Table of Contents
Semiconductors: What Lies Ahead?
Outline
A Vision of Life in the 21st Century
Megatrends in Information Technology (IT)
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The ‘Red Brick Wall’ Forecast by ITRS ‘99
Approaching a “Red Brick Wall”Challenges/Opportunities for Semiconductor R&D
Interconnections
Gate Dielectric Scaling(ITRS 1999)
Advanced CMOS Contact Structure at 50 nm
“Design is hard”
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CMOS Future Directions and Beyond
The Vertical Replacement-Gate (VRG) MOSFET
FinFET* Body is a thin silicon Fin *
Nano-devices Time-scale(May be occurring sooner than expected)
Traditional Cornerstones of MOSFET Device Physics
Emerging Nanoscale Semiconductor Physics Phenomena
Semiconductor structures as Supermolecules
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Bizarre Quantum World
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“The Economy, Federal Research, & the Semiconductor Industry”An SIA Initiative
“The Economy, Federal Research, & the Semiconductor Industry”
“The Economy, Federal Research, & the Semiconductor Industry”
“The Economy, Federal Research, & the Semiconductor Industry”
Conclusions
Questions
Acknowledgements
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